CMP Spindle and Pad Conditioner Refurbishment

New Slurry Systems Available

New Wafer Reclaim Process Solution


 

Global Field Support


  • Service & PM Contracts
  • Tool Down Support
  • Escalation Support
  • Process Applications Support
  • Tool Install and De-Install
  • Spare Parts
  • Parts Clean
  • Subassembly Repair

 


 

 

Other Fab Services


  • Tool Procurement
  • Module Support
  • Alternative Tool Selection
  • Cost effective Custom Tools
  • Materials and Consumables sourcing

 

Electrical and Mechanical Design


  • Software Design
  • Prototype System Development
  • Obsolete Parts Replacement
  • Control Systems
  • Mechanical Upgrades
  • Materials Replacement
  • Special Substrate Handling

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